A Professional Solution for Thin Film Deposition
The HEX Mini is engineered to meet the needs of researchers in materials science, applied physics, and electron microscopy. This compact system enables high-quality coatings on samples up to 2 inches in diameter, making it ideal for applications such as:
- Optical thin film coatings
- SEM/TEM sample preparation
- Deposition of electrical contacts
- Studies of transparent conductive oxides (TCO)
Flexible and Customizable Configuration
The HEX Mini is available in two primary versions:
- HEX Mini-S: Equipped with a 2″ DC sputtering source
- HEX Mini-T: Equipped with a thermal evaporation source
Both models are turbo-pumped and operate at a base pressure below 5×10⁻⁶ mbar, ensuring a clean and stable deposition environment.
Complete Process Control, Reliable Results
Integrated with dedicated control software and an intuitive human-machine interface (HMI), the HEX Mini allows fine adjustment of deposition parameters such as power, time, and atmosphere. This enables precise process control, improving reproducibility and experimental efficiency.
Compact Design, Powerful Performance
With a 0.8-liter chamber and minimal footprint, the HEX Mini fits easily onto any lab bench. Its plug-and-play architecture ensures quick setup and simplified operation, making it ideal for educational settings or laboratories with limited space.
Why Choose the HEX Mini?
- High-quality thin films even on a compact scale
- Ease of use through optimized software
- Configurable to match your deposition needs
- Reliability from a UK-manufactured system by Korvus Technology
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